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Alluxa - Optical Coatings LB 8/23

ArF Excimer Laser

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Gigaphoton Inc.
Gigaphoton Inc. is introducing the GT63A, a next-generation deep-UV ArF excimer laser for multipatterning immersion lithography scanners. The laser incorporates sMPL (spectrum multipositioning LNM)*1, a spectrum control (“focus drilling”) technology that achieves a wide depth of focus; sGRYCOS (sixty gigaphoton recycled chamber operation system), a chamber technology that lowers operating costs; sTGM (supreme total gas manager), a gas management system that enables longer uptime with less process gas use; and sMONITORING (smart monitoring), real-time information management...See full product

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