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Deep-UV Excimer Laser Mirrors

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MKS/Newport
IRVINE, Calif., Feb. 5, 2013 — Newport Corp. has announced deep-ultraviolet excimer laser mirrors with projected lifetimes of >30 billion pulses when used in the proper photocontamination-controlled environment. They feature all-dielectric high-reflector coatings to minimize absorption and maximize reflected energy at 193 nm. The high-energy laser mirrors are designed with excimer-grade UV fused silica substrates that are polished to better than λ/10 flatness and 10-5 scratch-dig surface quality to preserve wavefront quality and maintain stability. All coating and testing are done in a special...See full product

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