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FERA3 XMH Scanning Electron Microscope

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Tescan Brno s.r.o.
BRNO, Czech Republic, Dec. 13, 2011 — Tescan has unveiled the FERA3 XMH high-resolution Schottky field emission scanning electron microscope with an integrated plasma source focused ion beam (FIB). The system has been developed in cooperation with French company Orsay Physics. In addition to electron and ion columns, the microscope can be configured with gas injection systems, nanomanipulators, secondary electron detectors, backscatter detectors, secondary ion detectors, cathodoluminescence detectors, and energy-dispersive and electron backscatter diffraction microanalyzers. The use of a xenon plasma source for the...See full product

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