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PI Physik Instrumente - Revolution In Photonics Align ROSLB 3/24

FILM METROLOGY

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Rudolph Technologies Inc.
A transparent film metrology system from Rudolph Technologies Inc., called the SpectraLaser UTF, provides guaranteed subangstrom thickness accuracy of ±0.5 A and tool-to-tool matching of ±0.1 A. The system can characterize ultrathin films and ultrathin film stacks. It is suitable for semiconductor wafer manufacturing applications where all chips must have identical film thicknesses.See full product

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