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PI Physik Instrumente - Space Qualified Steering LW 1-15 MR

Galvanometer Drivers

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SCANLAB GmbH
New galvanometer drivers from Scanlab AG have lower inertia for precision laser positioning. The drives are equipped with lightweight beryllium mirrors and a 14-mm aperture. The positioning encoder uses a zero-mass laser beam to sense a stationary scale, eliminating inertia-increasing components. The new technology is featured in Scanlab’s dynAXISse galvanometer scanner and intelliSCANse 2-D scan system. Applications include semiconductor lithography, microstructuring, and processing of electronics and displays.See full product

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