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HELIOS1200 300mm Sputter Tool

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Buhler Inc., Business Area Leybold Optics
The HELIOS 1200 is the latest development of our renowned sputter tool for fully automated manufacture of demanding optical interference filters. The system addresses the market demand for coating tools for 300-mm wafer substrates for opto-semiconductor applications. High throughput and yield is achieved through high deposition rate, excellent uniformity, and in situ control of layer thickness by optical monitoring.See full product

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