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Helios NanoLab 1200AT Analysis System

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FEI Life Sciences (acquired by Thermo Fisher)
HILLSBORO, Ore., June 10, 2013 — FEI’s new Helios NanoLab 1200AT full-wafer DualBeam analysis system includes an optional automated front-opening universal pod loader, which allows location of the system inside the semiconductor wafer fab. Here, its scanning electron microscope imaging and precise focused ion beam milling are used to extract ultrathin samples of targeted structures and defects for examination in a high-resolution transmission electron microscope (TEM). The results are used to diagnose the root cause of a defect and evaluate process maturity. Moving the system closer to the wafer process line can...See full product

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