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High-Precision Vacuum Stages

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Steinmeyer Inc.
BURLINGTON, Mass., April 21, 2011 — Steinmeyer Inc. offers a range of precision stages suitable for ultrahigh-vacuum applications. The model MT105-LM-HV is one example. Shown is a compact two-axis (X-Z) version with a travel range choice of 30 or 50 mm. Positioning accuracy is 3 µm, with repeatability of ±0.2 µm. This product can be provided as a classic X-Y stage without adapter plate and can also be configured as an X-Y-Z system. Driven by a piezo motor, each stage includes stainless steel crossed roller linear bearings for smooth motion and robust load capacity. Both base and saddle are manufactured...See full product

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