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PI Physik Instrumente - Space Qualified Steering LW 1-15 MR

High-Reflectance Coating

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Teledyne Acton Optics
ACTON, Mass., July 31, 2015 — Acton Optics & Coatings, part of Princeton Instruments Inc., has announced the 193-nm XL high-reflectance coating for low-fluence, high-repetition-rate excimer laser applications. The multilayer dielectric coating features a ≥96 percent (45° angle of incidence) to ≥97 percent reflectance (normal incidence) at 193 nm. It combines a hybrid structure with balanced stress, optimized for excimer laser repetition rates of 4 to 5 kHz. The possibility of catastrophic damage due to microdefects and thermal stress fractures is reduced, while dehydration effects from...See full product

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