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Inline Sputtering System

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Request InfoKAHL AM MAIN, Germany, April 19, 2017 — The GENERIS PVD inline sputtering system from Singulus Technologies AG is designed for challenging transparent, conductive oxide layers such as indium tin oxide, aluminum-doped zinc oxide and Ag. The heterojunction cell technology achieves conversion efficiencies of >22 percent, as well as reduced manufacturing costs. The system is a horizontal inline sputter tool designed for special requirements in photovoltaic high efficiency cell production. The deposited indium tin oxide layers exhibit excellent optical transmittance. Charge carrier mobility and electron density are optimized to...See full product

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