Request InfoOnto InnovationWILMINGTON, Mass., Sept. 16, 2016 — Rudolph Technologies Inc. has announced the Firefly and Dragonfly inspection and metrology systems for advanced semiconductor manufacturing. Both systems leverage newly designed optical and imaging systems optimized for defect type, size and maximum throughput. The Firefly system is designed for high-resolution inspection in front- and back-end applications. It is designed to detect defects smaller than one micron in multiple applications including fan-out wafer level packaging, CMOS image sensors, microelectromechanical systems and radio frequency sensors. The Dragonfly system is...See full productRelated content from Photonics MediaPRODUCTSPhotonics Spectra February 2023 Issue3D Scan HeadThe Firefly 3D scan head from Novanta positions real-time monitoring as a standard, enabling Sigma Additive Solution's data analytics and quality assurance software suite. 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