Request InfoMKS/NewportNewport Corp. has launched an integrated vertical and rotation stage, the ZVR, for semiconductor wafer positioning, metrology, inspection and repair. It also is useful in LED production, 3-D scanning, digitizing models and validation applications. It features a rigid design with improved cantilevered load capacity, lower crosstalk and higher dynamic system performance than offered by earlier designs. With a low-profile footprint, low mass and a high natural frequency, the stage accommodates a variety of rapid step-and-settle positioning applications. 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