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Interference Filters

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Laser Components GmbH
Photolithographic filters are used in applications with LSI and LCD steppers in which high-power mercury vapor lamps are used for illumination. The narrow bandpass filters produce an almost monochromatic radiation, allowing high resolution to be achieved in the target. Laser Components GmbH’s partner Omega Optical has revised its i-line bandpass filters. The filter designs are now available based on dual magnetron reactive sputtering coating, significantly improving both the intensity of the i-line and its homogeneity in the photolithographic process. One new product from...See full product

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