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DataRay Inc. - ISO 11146-Compliant Laser Beam Profilers

Linear Motor Stage

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Aerotech Inc.
PITTSBURGH, June 17, 2015 — Aerotech Inc. has introduced the PlanarDLA series of integrated, open-frame, low-profile linear motion stages. Applications range from two-sided LED wafer processing, where high dynamics and micron-level straightness are required, to quasistatic optical metrology, where high-accuracy and precise geometric performance are necessary. High-precision roller bearings, precision-machined surfaces and noncontact direct-drive linear motors driving through the axes' centers of stiffness result in a positioning stage with straightness to ±0.5 μm and flatness to ±1.25 μm....See full product

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