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Deposition Sciences Inc. - Difficult Coatings - LB - 8/23

Linear Motor Stages

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MKS/Newport
The XM series of linear stages from Newport Corp. is now available with a minimum incremental motion of 1 nm for nanopositioning applications, including laser machining, semiconductor wafer processing, sensor test and calibration, and ultraprecision assembly. The stages’ improved performance is the result of an optimized driver design with the XPS-DRV02L drive module to deliver dynamic performance with consistent, reliable motion. With a frictionless direct-drive device, the stages offer motion performance that is not limited by backlash, hysteresis, wind-up or stiction. In...See full product

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