Request InfoVeeco Instruments Inc.Designed to meet critical dimension, depth, sidewall angle and chemical mechanical planarization metrology requirements for 45- and 32-nm-node semiconductor processes, the InSight 3DAFM atomic force microscope manufactured by Veeco Instruments Inc. performs high-resolution nondestructive 3-D measurements. It provides production-based reference metrology on crucial CD elements encountered in lithography and advanced etch processing, including gate, shallow trench isolation, dual-damascene structures and line-edge variation. 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