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Trioptics GmbH - Worldwide Benchmark 4-24 LB

Metrology Suite

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Nova Ltd.
REHOVOT, Israel, Mar. 7, 2022 — A metrology suite from Nova Ltd. addresses the manufacturing challenges of next-generation logic devices. The Nova PRISM enables superior metrology performance in critical applications, enabled by the platform's spectral interferometry technology. The Nova i570 integrated metrology platform improves total inline measurement capabilities in small structures and multiple layers for high-volume manufacturing. Nova METRION® enables depth profiles of materials composition in nanosheet manufacturing material deposition. Nova ELIPSON™ utilizes advanced Raman spectroscopy technology...See full product

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