Close

Search

Search Menu
Photonics Media Photonics Marketplace Photonics Spectra BioPhotonics EuroPhotonics Vision Spectra Photonics Showcase Photonics ProdSpec Photonics Handbook

NESSY II: For Coatings in EUV Applications

Facebook Twitter LinkedIn Email Comments
Request Info
Buhler Inc., Business Area Leybold Optics
Leybold Optics has developed the second generation of a unique sputtering system for coating at 13.4 nm – the EUV range. The coating system can feature up to six sputtering targets to coat MO and Si layers. The layer systems consist of more than 100 layers with very tight thickness specifications that require high precision, high stability and excellent reproducibility. The machine also features a load lock. The tool is used for applications in EUV lithography.See full product

Related content from Photonics Media



    PRODUCTS


    ARTICLES


    PHOTONICS HANDBOOK ARTICLES


    WHITEPAPERS


    WEBINARS


    PHOTONICS DICTIONARY+ TERMS


    VIDEOS


    PHOTONICS BUYERS' GUIDE CATEGORIES


    COMPANIES


    back to top
    Facebook Twitter Instagram LinkedIn YouTube RSS
    ©2020 Photonics Media, 100 West St., Pittsfield, MA, 01201 USA, [email protected]

    Photonics Media, Laurin Publishing
    x We deliver – right to your inbox. Subscribe FREE to our newsletters.
    We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.