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ODD-SXUV-DLPSD UV/EUV Position Sensor

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Opto Diode Corporation
NEWBURY PARK, Calif., Feb. 28, 2014 — Opto Diode Corp. has released the ODD-SXUV-DLPSD duolateral UV/EUV (extreme-UV) submicron position resolution sensor for positioning and advanced lithography applications. The device provides a stable response after exposure to UV and/or EUV radiation. Featuring a 5 × 5-mm active area, the position-sensing photodiode operates from 1- to 400-nm wavelengths. Responsivity at 13 nm is typically 0.2 A/W; at 354 nm, responsivity is typically 0.02 A/W. Dark current under operating conditions is 10 nA, typical, and 50 nA, maximum. The device offers reverse breakdown voltage of a...See full product

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