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Vescent Photonics LLC - Lasers, Combs, Controls 4/15-5/15 LB

PATTERN INSPECTION

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Nikon Instruments Inc.
The APM-3000 series automated pattern profile inspection device has been unveiled by Nikon Instruments Inc. Comprising an optical system with a polarizer and a high-numerical-aperture objective, it leverages a form of birefringence in a Fourier space to detect critical dimension and pattern edge roughness variations, which are detected as polarization fluctuations and converted by the polarizer into the light intensity.See full product

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