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Piezo Nanopositioning Stages

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Aerotech Inc.
PITTSBURGH, June 9, 2016 — Aerotech Inc. has announced the QNPHD linear piezo nanopositioning stages in a compact, high-stiffness package. With a direct-metrology, capacitive sensor feedback option, high resonant frequencies, and high load capacity, the QNP is ideal for a wide range of high-speed and high-precision applications such as scanning probe microscopy, disc-drive testing and semiconductor wafer articulation. Optional closed-loop feedback using a unique capacitive sensor design allows for subnanometer resolution and single-digit nanometer linearity errors. The capacitive sensors measure the output of the...See full product

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