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Piezoelectric Actuators

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piezosystem jena GmbH
The PU 100 CAP piezoelectric actuator series from piezosystem jena enables new positions and position readjustments to be implemented within a few milliseconds. The piezo-driven positioning solution is suitable for probe alignment in the semiconductor, optics and laser technology industries. Features include real-time adjustment, travel range up to 80 μm and, in the high-load version, the capability to move a load of 50 lb. Three of the systems, mounted on a circle 120° to each other, are suitable for wafer chuck movement. The piezoelectric actuators that are completely...See full product

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