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Process Vacuum Monitor

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Hiden Analytical Ltd.
Hiden Analytical Ltd.’s HALO 201 MBE (molecular beam epitaxy) in-process vacuum monitor is designed for thin-film preparation and etching. Mounting on a standard DN-40-CF Conflat-type flange, the probe’s sensitive ionization region is totally shrouded to inhibit random surface deposition. Construction materials are restricted to stainless steel, molybdenum and alumina to minimize potential process contamination in aggressive environments. The unit has a mass range of 1 to 200 atomic mass units for measurement of all common gases and contaminants, with operating modes...See full product

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