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Perkins Precision Developments - Plate Polarizers LB 4/24

Rotation Stage

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MKS Instruments Inc.
ANDOVER, Mass., May 31, 2021 — The Newport™ RGA150 low-profile, fast-rotation stage from MKS Instruments Inc. is a mid-size, high-speed, large-aperture rotation stage designed for semiconductor wafer positioning applications. With a low mass and low profile of 60 mm, the RGA150 can easily be mounted on XY stages to quickly adjust the angular position of a wafer held by a vacuum chuck while enabling fast XY positioning. In addition, the Newport RGA150 is also well-suited for other industrial production applications such as imaging and topography, as well as laser machining and through-hole optical microscopy. ...See full product

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