Request InfoAtonarp Inc.The Aston metrology platform from Atonarp Inc. aims to increase yield, throughput, and efficiency in semiconductor manufacturing processes. The in situ platform features an integrated plasma ionization source. It can replace multiple legacy tools and provide high levels of control across a comprehensive set of applications including lithography, dielectric and conductive etch and deposition, chamber clean, chamber matching, and abatement. Aston optimizes production by detecting exactly when a process has finished, including chamber cleaning, which can reduce required clean time....See full productRelated content from Photonics MediaPRODUCTSPhotonics Spectra January 2023 IssueSide-Pumped ModulesThe SP17 and SP18 high-power side-pumped modules from Focuslight Technologies Inc. offer peak powers of 30 and 5 kW, respectively. 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