Request InfoPark Systems Corp.The Park NX-Hybrid WLI semiconductor metrology system from Park Systems Corp. combines atomic force microscopy (AMF) with white light interferometer profilometry, forming a comprehensive automated metrology system. The metrology solution is designed for semiconductor applications requiring both large-area scanning and nanoscale metrology. The integrated system is based on the Park NX-Wafer, an automated atomic force microscopy system for semiconductor and related device manufacturing, in-line quality assurance, and R&D. High throughput imaging is provided over a large area, with...See full productRelated content from Photonics MediaPRODUCTSPhotonics.com 11/18/2022Photomask Repair EquipmentPark NX-Mask photomask repair equipment from Park Systems Corp. supports dual pods for handling extreme UV masks on inline production. 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