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Alluxa - Optical Coatings LB 8/23

Two-Axis Linear Stage

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Aerotech Inc.
Aerotech’s ANT130XY crossed-roller-bearing, direct-drive, dual-axis stage offers 60- × 60-mm, 110- × 110-mm, and 160- × 160-mm travels. Direct-drive has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion in both the X and Y dimensions. ANT130XY has 1-nm resolution, ±75-nm repeatability, ±250-nm accuracy, and <1-nm in-position stability. The sleek design provides an extremely low profile of only 85 mm.See full product

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