Request InfoCyberOptics Corp.WILSONVILLE, Ore., June 25, 2010 — CyberOptics Semiconductor Inc.’s WaferSense Auto Gapping System, the AGS300, is available in 300- and 200-mm form factors. It measures gaps that are critical to the outcome of semiconductor processes such as thin-film deposition, sputtering and etching. Consisting of three capacitive distance sensors, the system measures the gaps between shower heads and pedestals at three points that define a plane to ensure accurate and reproducible equipment setups. Using the system, engineers can better control gap uniformity and magnitude with high stability over time. While legacy gap...See full productRelated content from Photonics MediaPRODUCTSPhotonics Spectra September 2023 IssueMultisensor Metrology SystemThe SmartScope® E45 floor model multisensor metrology system from Optical Gaging Products is an automatic digital zoom device. 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