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X-Y-Z Nanopositioning Stage

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PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo Mechanics
For use with a 3-D laser lithography system made by Nanoscribe GmbH, PI (Physik Instrumente) L.P. has released an X-Y-Z nanopositioning stage. The lithography system produces complex 3-D structures, fully automatic and repeatable, with precision and flexibility. Submicron structures with sizes of up to 1 mm and widths to 150 nm are possible. The PImars P-563 flexure-guided, piezo-driven three-axis nanopositioning stage provides positioning ranges to 300 × 300 × 300 μm and nanometer-range repeatability. An integrated parallel-metrology position feedback system...See full product

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