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Rotary Air-Bearing Stages

Aerotech Inc.Request Info
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Aerotech’s ABRT rotary air-bearing stages provide 360° continuous travel with resolution to 0.027 arcsec. Velocity stability and error motion performance are exceptional. Payload capacity is up to 69 kg due to the outstanding radial/axial stiffness. ABRT is for optical inspection and fabrication, DVD mastering, wafer inspection, high-precision metrology applications, x-ray diffraction systems, MEMS/nanotechnology device fabrication and more.

Photonics Showcase
May 2010

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Aerotech Inc.Aerotech’s%! ABRT rotary air-bearing stagesarcsecDVD masteringerror motionEuroPhotonics Product SpotlightfabricationFeatured ProductsimagingMEMS/nanotechnologymetrologyoptical inspectionPayload capacityPhotonics ShowcaseProduct Showcaseradial/axial stiffnessrotarystagesTest & Measurementvelocity stabilitywafer inspectionx-ray diffraction

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