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Rotary Stages

Photonics Spectra
Jul 2018
PI (Physik Instrumente) LP, Air Bearings and Piezo Precision MotionRequest Info
 
Rotary StagesThe PIglide RL rotary stages from Physik Instrumente LP feature three-phase, low-cogging, slotless torque motors with velocity to 500 rpm.

The stages feature optical encoders and provide 0.0015-µrad resolution, ±2-µrad bidirectional repeatability, and absolute accuracy of ±6 µrad, with error compensation and a motion controller. Geometric performance provides 50-nm flatness, ±50-nm radial runout, and 1-µrad wobble. Available in two motion platform diameter sizes of 200 or 300 mm, various options can be combined to create a solution ideal for point-to-point indexing or constant velocity scanning.

The rotary positioners have a virtually unlimited life; there are no parts that wear or require maintenance.


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