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Rotation Stage

IntelLiDrives Inc.Request Info
 
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Rotation StageThe ACR-335UT precision rotation stage from IntelLiDrives Inc. is a low-profile rotary table with a high-speed direct-drive rotary servo motor.

A large 335-mm center aperture and lightweight construction makes this device an ideal choice for handling 300-mm silicon wafers in semiconductor processing. The ACR-335UT has a wide dynamic speed range, can move at sub-rpm speed with low velocity ripple, and is able to accelerate quickly to 300 rpm.

This stage can be easily installed into IntelLiDrive’s low-profile open frame XY tables with a minimal stack-up height to minimize Abbe error.


Published: August 2018
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