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Rotation Stage

MKS Instruments Inc.Request Info
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ANDOVER, Mass., May 31, 2021 — Rotation StageThe Newport RGA150 low-profile, fast-rotation stage from MKS Instruments Inc. is a mid-size, high-speed, large-aperture rotation stage designed for semiconductor wafer positioning applications.

With a low mass and low profile of 60 mm, the RGA150 can easily be mounted on XY stages to quickly adjust the angular position of a wafer held by a vacuum chuck while enabling fast XY positioning. In addition, the Newport RGA150 is also well-suited for other industrial production applications such as imaging and topography, as well as laser machining and through-hole optical microscopy.

With an accuracy of ±0.001°, a bi-directional repetition of ±0.0975 mdeg, a minimum incremental motion of 0.01 mdeg, and a maximum speed of 300 rpm, the RGA150 delivers high repeatability and accuracy.
May 2021

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ProductsNewportRGA150rotation stageMKS InstrumentspositioningsemiconductorsWafersimaginglasersMicroscopyindustrialAmericas

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