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SD1024X Endpoint Control Spectrometer

Photonics.com
Jun 2012
Verity Instruments Inc.Request Info
 
CARROLLTON, Texas, June 26, 2012 — Verity Instruments Inc. has released the SD1024X, a fully embedded smart spectrometer that combines the functionality of a spectrometer and an applications computer, resulting in a smaller footprint, reduction of cabling and elimination of the changes associated with computer components, peripherals and operating systems.

The embedded X-NeT software offers advantages over traditional PC-based programs. The company’s customized Linux operating system (OS) kernel provides deterministic timing for predictable, repeatable end-point detection and reporting, and eliminates downtime caused by common viruses. The company says the OS will not become obsolete because it makes and tests all updates. The modular design of the software increases customization options with faster modification response time (resulting from the reduced time needed for testing a module relative to the entire program).

As an autonomous system, the SpectraNeT user interface is a connect-when-needed Microsoft Windows-based application that enables remote access based on Semi Standard E132. It can be used with a direct Ethernet connection, across a LAN or the Internet. When not connected to the SD1024X, it can be used to analyze collected data files and/or to create new end-point algorithms for future SD1024X implementation.

Real-time tool control is handled by an Ethernet or RS-232 connection directly to the spectrometer, which supports the Verity Communication Protocol over TCP/IP or RS-232, as well as the user-defined ASCII protocol over RS-232.

The RoHS-compliant spectrometer is used in semiconductor process control applications, such as low exposed area contact etch. When coupled with a Verity flashlamp, it can be used as a spectral reflectometer for film thickness and depth measurement. Its 200- to 800-nm spectral range optical system employs a thermoelectrically cooled CCD detector with good ultraviolet response, high sensitivity, low noise and a wide dynamic range.


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Americasend-point detectionend-point reportingLinux operating systemlow exposed area contact etchProductsRoHS-compliant spectrometerSD1024XSemi Standard E132semiconductor process controlSensors & Detectorsspectral reflectometerSpectraNeT user interfaceSpectrometerspectrometer Ethernetspectrometer RS-232spectroscopyTCP/IPTE-cooled CCD detectorTest & MeasurementTexasuser-defined ASCII protocolVerity Communication ProtocolVerity InstrumentsX-NeT spectrometer software

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