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Vibration Cancellation System
PEABODY, Mass., Nov. 9, 2009 – Technical Manufacturing Corp. has expanded its STACIS active piezoelectric vibration cancellation product line with the introduction of the STACIS SEM-Base floor platform for scanning electron microscopes (SEMs).

TechnicalManufacturingCorp.jpgSEM-Base is a compact, cost-effective system that has a much smaller footprint than the 2100 model. It installs easily with minimal tuning and offers subhertz vibration cancellation in an active hard-mount floor platform that fits most commercial scanning electron microscopes. It is compatible with all internal SEM vibration isolation systems. 

The system is designed for integration into advanced high-throughput lithography and metrology tools. The technology is capable of fast settling of the isolated payload in response to motorized stage-induced motion, resulting in increased tool throughput. The platform provides vibration isolation comparable to that delivered by the company’s 2100 model but is specifically designed to be the primary isolation system incorporated inside the tool.

Vibration cancellation starts below 1 Hz. The system features extended-stroke piezoelectric actuators and damped powder-coated steel plates that sandwich four isolators and the proprietary DC 2000 digital controller. It is 0.14 m tall, measures 0.90 × 1.13 m and weighs <181 kg. It can support 900 to 2500 lb with no soft air suspension and is available with three or six degrees of freedom.

For more information, visit:  

Technical Manufacturing Corp.
15 Centennial Drive
Peabody, MA 01960
Phone: (978) 532-6330
Toll Free: (800) 542-9725
Fax: (978) 531-8682
Nov 2009

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active piezoelectricBiophotonicsdigital controllerextended-strokefast settlingfloor platformfour isolatorshard-mountindustriallithography toolsmetrologymetrology toolsMicroscopyphotonicsphotonics.comProductsSEMsSTACIS SEM-BasesubhertzTechnical Manufacturingvibration cancellation

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