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Sapphire Wafer Carriers

Meller Optics Inc.Request Info
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A low-cost line of sapphire wafer carriers perforated with custom patterns for vacuum hold-down or delamination and more durable than quartz and other materials (second only to diamond in terms of hardness, according to the company) is available from Meller Optics Inc. They are designed for thinning semiconductor materials, such as GaAs, and feature Moh 9 hardness. Sapphire offers good mechanical strength due to its off-axis crystal growth that permits custom fabrication of wafer carriers as thin as 0.4572 mm. Available with diameters from 50.8 to 152.4 mm, with flats and laser markings, the wafer carriers are chip-, chemical- and scratch-resistant, and they can withstand repeated use.

Photonics Spectra
May 2010

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chemicalchipcrystal growthdelaminationdiameterdiamondfabricationflatsGaAshardnessindustriallaser markingmechanical strengthMeller OpticsMoh 9New Productsopticspatternsquartzsapphiresapphire wafer carrierscratch resistancesemiconductorsthinvacuumwafer carriersWafers

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