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Scanner and Stage Device

Photonics Spectra
Aug 2018
Physik Instrumente (PI) GmbH & Co. KGRequest Info
 
Scanner and Stage DeviceThe XLSCAN from Physik Intrumente LP, ACS Motion Control, and SCANLAB GmbH is a new process that combines the operation of a galvanometer scanner and a machine stage into a single, integrated platform.

The device allows simultaneous control and movement of the galvanometer scanner and the XY stage, effectively overlaying the small field of view of the scanner with the longer travel of the stage. It enables continuous scanning without stitching errors.

Throughput is also increased, and the zero following error of the galvanometer scanner delivers high accuracy.


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