Search
Menu
Gentec Electro-Optics Inc   - Measure With Gentec Accuracy LB

Semiconductor Metrology Platform

Atonarp Inc.Request Info
 
Facebook X LinkedIn Email
Semiconductor Metrology PlatformThe Aston metrology platform from Atonarp Inc. aims to increase yield, throughput, and efficiency in semiconductor manufacturing processes.

The in situ platform features an integrated plasma ionization source. It can replace multiple legacy tools and provide high levels of control across a comprehensive set of applications including lithography, dielectric and conductive etch and deposition, chamber clean, chamber matching, and abatement.

Aston optimizes production by detecting exactly when a process has finished, including chamber cleaning, which can reduce required clean time. It is resistant to corrosive gases and gaseous contaminant condensates, featuring independent dual ionization sources that work reliably in harsh conditions.


Published: July 2021
REQUEST INFO ABOUT THIS PRODUCT
* First Name:
* Last Name:
* Email Address:
* Company:
* Country:
Message:


When you click "Send Request", we will record and send your personal contact information to Atonarp Inc. by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our Privacy Policy and Terms and Conditions of Use.

Register or login to auto-populate this form:
Login Register
* Required

ProductsSemiconductor Metrology PlatformAstonAtonarpindustrialmetrologysemiconductorsAsia-Pacific

We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.