Semiconductor Metrology Tool
FormFactorRequest Info
The FRT MicroProf® PT from FormFactor Inc. is a metrology and inspection system for high-throughput panel measurement in advanced packaging.
The system is capable of handling rectangular panels up to 600 × 600 mm. With full automation and hybrid metrology capabilities, it can perform various 3D measurements and defect detection on large-format panels used in advanced package technologies like fan-out panel-level packaging. It integrates high-precision sensors to measure inter-die connections, film thickness, roughness, and other characteristics. The system supports factory floor automation and provides crucial defect inspection data for process control and yield improvement.
https://www.formfactor.com
https://www.photonics.com/Buyers_Guide/FormFactor/c2300
Photonics Spectra
Aug 2023
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