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Semiconductor Metrology Tool

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The FRT MicroProf® PT from FormFactor Inc. is a metrology and inspection system for high-throughput panel measurement in advanced packaging.

The system is capable of handling rectangular panels up to 600 × 600 mm. With full automation and hybrid metrology capabilities, it can perform various 3D measurements and defect detection on large-format panels used in advanced package technologies like fan-out panel-level packaging. It integrates high-precision sensors to measure inter-die connections, film thickness, roughness, and other characteristics. The system supports factory floor automation and provides crucial defect inspection data for process control and yield improvement.

Photonics Spectra
Aug 2023
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ProductsFRT MicroProf PTFormFactormetrology systemmetrologyTest & MeasurementsemiconductorspackagingAmericas

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