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Sensing Platform

Advanced Energy Industries Inc.Request Info
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DENVER, July 12, 2023 — The Luxtron® M-1100 integrated converter platform from Advanced Energy Industries Inc. offers high-accuracy sensing across a wide temperature range.

The system is designed for plasma-enhanced semiconductor deposition and etch fabrication processes and can operate from -200° to 450 °C with an accuracy of +/- 0.1 °C and stability of +/- 0.05 °C. It features five channels for monitoring multiple probes, and its flexible communication outputs enable digital monitoring, updates, and system integration. The converter utilizes fiber optic probes with phosphor sensor technology and supports both analog and EtherCAT communication interfaces. It can be wall-mounted for easy implementation.
Jul 2023
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ProductsLuxtronM-1100integrated converter platformsensing platformAdvanced EnergySensors & DetectorssemiconductorsplasmaCommunicationsAmericas

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