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Showerhead Reactor

Aixtron SERequest Info
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Aixtron AG is offering the close-coupled nitride showerhead Crius metallorganic chemical vapor deposition system in 31 x 2-, 30 x 2-, 12 x 3-, 7 x 4-, 3 x 6- and 1 x 12-in. configurations. Used in LED epiwafer production, it is equipped with a dynamic reactor height adjustment feature that facilitates growth at elevated pressures. The reactor is fitted in an integrated circuit system design and features six optical ports and a moly liner.

Photonics Spectra
May 2010

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Aixtron AGCriusepiwaferintegrated circuitsmetallorganic chemical vapor deposition systemmoly linerNew Productsnitride showerheadoptical portreactorTest & MeasurementLEDs

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