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Single-Wafer Cleaning & Etching Tool

RENA Technologies GmbHRequest Info

Single-Wafer Cleaning & Etching Tool. cOURTESY OF RENA.

Vanguard from RENA Technologies is a fully automated single-wafer platform designed for wet chemical cleaning, etching, and drying of 200-mm and 300-mm wafers. Its advanced chemical cleaning and double-sided processing can handle up to five distinct chemistries, which minimizes contamination, substrate damage, and defects, ensuring wafers meet the stringent yield and quality requirements of cutting-edge chip manufacturing. The platform operates within a Class 1 mini environment, which guarantees ultra-clean wafer handling, while its advanced drying ensures residue-free, pristine surfaces for downstream processing.

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About this supplier

Published: December 2025

There are 46 suppliers of Wafers in the Photonics Marketplace.

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