SinguLYS Air-Bearing Stages

MKS/NewportRequest Info
Facebook X LinkedIn Email
Newport Corp. has announced the SinguLYS family of single-axis air bearing stages. The new stage and bridge configurations combine high performance with modularity, making them suitable for single-axis, split XY and gantry applications.

The SinguLYS S-370 stage is manufactured from silicon carbide (SiC) ceramic components. The body’s rigid and compact footprint with three-point mounting allows this stage to be used in tight spaces without the need for large, lapped mounting surfaces to maintain precise trajectory. The lightweight carriage features integrated pressure-vacuum air bearings which are guided by a precisely lapped SiC body. The stages are suitable for tasks with high duty cycles that require low angular deviation, tight velocity regulation and high cleanliness standards.

The SinguLYS B-1200 air-bearing bridge features a proprietary ceramic beam that is three times lighter than steel and offers triple the stiffness of granite. When used to replace a steel or granite-based design in an existing or next-generation tool, its properties can improve acceleration and decrease settling times, which increases throughput and accuracy with minimal system redesign. The lightweight and rigid pressure-vacuum air-bearing carriage accommodates 10-kg cantilevered payloads with 2.5-g acceleration and, unlike stages using mechanical bearings, minimizes contamination to the substrate below. Applications include Gen 8-11 flat panel display inspection, thin-film photovoltaic scribing and wafer processing.

Specially designed for frictionless operation, both the S and B series products are sturdy and reliable, and they require no maintenance or lubrication.

Published: July 2010
* First Name:
* Last Name:
* Email Address:
* Company:
* Country:

When you click "Send Request", we will record and send your personal contact information to MKS/Newport by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our Privacy Policy and Terms and Conditions of Use.

Register or login to auto-populate this form:
Login Register
* Required

Photonics Marketplace
Looking for Air Bearings? There are 5 companies listed in the Photonics Buyers' Guide.
Browse Cameras & Imaging, Lasers, Optical Components, Test & Measurement, and more.
air-bearingAmericasB-1200CaliforniaceramicDisplaysfrictionlessgantryGen 8-11 flat panel display inspectiongreen photonicsindustrialNewportProductsS-370SiCsilicon carbidesingle-axisSinguLYSsplit XYstagesTest & Measurementthin-film photovoltaic scribingthree-point mountingwafer processing

We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.