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Hamamatsu Corp. - Photonics West 2026 LB

Six-Axis Piezo Stage

PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo MechanicsRequest Info
 
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PI 6-Axis Piezo StageThe P-562.6CD from PI is a 6-axis nanopositioning stage for applications in photonics, semiconductor metrology, super-resolution microscopy, and nanomanufacturing. The operating principle of the stage is based on a parallel-kinematic design with only one moving platform for all six axes and is programmed with the company’s E-712 digital servo piezo controller. The P-562.6CD includes interfaces such as Ethernet, USB, SPI, RS-232, and analog, as well as supported functions including wave generating, data recording, auto zeroing, and trigger I/O.


Published: April 2025




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Productspiezoelectric positioning stagesstagesmaterials processingsemiconductorsmetrologyTest & MeasurementMicroscopyindustrialAmericasPI

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