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Six-Axis Parallel Positioner
Apr 2011
PI (Physik Instrumente) LP, Air Bearings and Piezo Precision MotionRequest Info
AUBURN, Mass., April 8, 2011 — PI (Physik Instrumente) L.P. has launched a miniature hexapod. Two versions for standard conditions and for vacuum applications are available.

The M-811 miniature hexapod measures 130 mm in diameter and 115 mm in height. It can accommodate loads up to 5 kg and position them in all six degrees of freedom with submicrometer precision.

It features actuator resolution of 0.04 µm, repeatability of ±0.5 µm and a randomized center of rotation. Velocity is to 10 mm/s, XYZ travel is 35/35/13 mm, and XYZ rotations are 20°/20°/40°.

The vacuum parallel kinematic hexapod positioner is bundled with software and a digital controller with high-speed Ethernet connectivity. Programming and commanding the hexapod are simple because all positions are given in Cartesian coordinates (XYZ, Theta X, Theta Y, Theta Z).

Parallel-kinematics positioning systems have advantages over conventional stacked multiaxis positioners. All six actuators directly affect one common platform, reducing mass and inertia, and there is no accumulation of the lateral and angular runout errors of the individual axes. The user can set and change the pivot anytime via software.

The hexapod has applications in medical engineering, x-ray microscopy, photonics alignment, semiconductor test and metrology, astronomy, precision machining, aeronautics and high-energy physics.


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aeronauticsAmericasastronomyBasic ScienceBiophotonicsCartesian coordinatesdigital controllerEthernethigh-energy physicsM-811 hexapodMassachusettsmedical engineeringmetrologyMicroscopyparallel positionerphotonics alignmentPI (Physik Instrumente)precision machiningProductssemiconductor metrologysemiconductor testsix-axisSoftwareTest & Measurementvacuum applicationsx-ray microscopy

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