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Rehm Thermal Systems GmbHRequest Info
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Rehm Thermal Systems GmbH has launched the Solardryer RDS 2100 and RDS 3000 for metallization lines. The drying process consists of a combination of five infrared zones and one central convection zone, offering temperature profiling that can be adjusted for precision and flexibility. These horizontal throughput systems guarantee a safe transport through the oven via either mesh belt or with pin chain up to three lanes. In the mesh belt systems, the conveyor of the heating zone can be separated from that of the cooling zone so that no latent heat is carried into the cooling area, offering a higher cooling gradient and a shorter oven. And at belt speeds of up to 6 m/min, the RDS series provides high throughput of up to 5700 wafers/h. They enable new levels of metallization process performance with features including single-, dual- and triple-lane handling of wafers, an integrated residue management system that maintains a clean process chamber and extends maintenance intervals, and profile control and process monitoring, including reference products for baseline profiling.

Oct 2010

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baseline profiliingcentral convectioncooling zonedrying processenergyEuropeheating zoneinfraredmesh beltmetallizationpin chianprocess chamberprocess monitoringProduct Previewprofile controlRehmRehm Thermal Systems GmbHresidue managementSolardryer RDS 2100Solardryer RDS 3000temperature profiliingthroughputWafers

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