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Spectra-G Abatement Systems

Edwards Vacuum Inc.Request Info
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For Compound Semiconductor Manufacturing
WILMINGTON, Mass., June 22, 2007 -- BOC Edwards, a supplier of vacuum, abatement, chemical management equipment and services to semiconductor OEMs and fabs, said its new Spectra-G exhaust abatement system is designed as a high-performance, cost-effective and environmentally friendly abatement solution for compound semiconductor MOCVD (metallorganic chemical vapor deposition) processes that include high flows of hydrogen and ammonia.

SpectraG800-3.jpgThe Spectra-G exhaust abatement system is a large-scale, combustion-based abatement system capable of treating all exhaust gases generated by MOCVD production tools. Two models are available, the SG800 and SG3000. A six inlet head and high flow capacity allow it to handle exhaust for multiple process tools.

Fuel cost is minimized due to the system’s use of the exhaust gas itself as the primary fuel source, the company said. Careful management of the combustion process minimizes the formation of undesirable NOx. A high velocity air flow transports heat and combustion products out of the system, completely eliminating the need for water and treatment facilities. Oxide particles can be removed from the air stream by filtering or a central scrubber.

"The Spectra-G exhaust abatement system is an innovative solution for handling the hydrogen and ammonia-laden MOCVD exhausts from GaN tools," said Mike Czerniak, product marketing manager, BOC Edwards. "We’ve experienced a fairly spectacular entry into the market; we have sold multiple systems to one of the world’s leading LED manufacturers, and this has been followed with additional sales to a leading manufacturer in Asia."

The Spectra-G exhaust abatement system is suitable for all nitride-based MOCVD applications. The high flow capacity allows it to process exhaust from up to six tools simultaneously. Dedicated inlets for each tool keep exhaust streams separated until they are introduced into the combustor. Both models of the Spectra-G exhaust abatement system are available now, the company said.

For more information, visit:; e-mail:

BOC Edwards
North America Headquarters
301 Ballardvale St.
Wilmington, MA 01887
Phone: (978) 658-5410
Fax: (978) 657-6546
Jun 2007

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abatementammoniaBOC Edwardschemicalcompound semiconductorexhaustgasesMOCVDnanophotonicsProductssemiconductorSpectra-GvacuumLEDs

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