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Super Agilis™ High Speed Linear Stages

MKS/NewportRequest Info
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Super Agilis™ High Speed Linear StagesFor Micro and Nanopositioning applications, MKS offers the Super Agilis™ piezo motor linear stages, integrated with a CONEX-SAG piezo motor controller and driver in both closed-loop and open-loop versions. For out-of-the box control, the controller is preconfigured and delivered to control the included linear stage. It offers high speed (10 mm/s) across travel ranges up to 48 mm, and Minimum Incremental Motion as low as 25 nm in the closed loop version.

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Productspositioninglinear stagesnanopositioning applicationspiezo motorclosed loopopen loop

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