Super Agilis™ High Speed Linear Stages
MKS/NewportRequest Info
For Micro and Nanopositioning applications, MKS offers the Super Agilis™ piezo motor linear stages, integrated with a CONEX-SAG piezo motor controller and driver in both closed-loop and open-loop versions. For out-of-the box control, the controller is preconfigured and delivered to control the included linear stage. It offers high speed (10 mm/s) across travel ranges up to 48 mm, and Minimum Incremental Motion as low as 25 nm in the closed loop version.
https://www.newport.com/f/super-agilis-piezo-linear-stage
https://www.photonics.com/Buyers_Guide/MKS_Newport/c10218
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