Super Agilis Linear Stages
MKS/NewportRequest Info
For micro- and nanopositioning
applications, MKS offers the Super
Agilis™ piezo motor linear stages,
integrated with a CONEX-SAG piezo
motor controller and driver in both
closed-loop and open-loop versions.
It offers high speed (10 mm/s) across
travel ranges up to 48 mm, and
minimum incremental motion as low
as 25 nm in the closed-loop version.
https://www.newport.com
https://www.photonics.com/Buyers_Guide/MKS_Newport/c10218
Photonics Showcase
Apr 2021
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