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Super Agilis Linear Stages

MKS/NewportRequest Info
 
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Super Agilis Linear StagesFor micro- and nanopositioning applications, MKS offers the Super Agilis™ piezo motor linear stages, integrated with a CONEX-SAG piezo motor controller and driver in both closed-loop and open-loop versions. It offers high speed (10 mm/s) across travel ranges up to 48 mm, and minimum incremental motion as low as 25 nm in the closed-loop version.

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Apr 2021
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