TFE Scanning Microscope

Combining high resolution imaging and high speed analysis, the microscope integrates a semi-in-lens objective lens with an in-lens thermal electron gun. The gun, combined with an aperture angle optimizing lens, can achieve a probe current of 200 nA or higher at an accelerating voltage of 15 kV. The microscope has a guaranteed resolution at a high accelerating voltage of 1.0 nm (30 kV; WD 4.5 mm), at a low accelerating voltage of 1.5 nm (1 kV; WD 1.5 mm) and at a high probe current of 3.0 nm (current 5 nA, 15 kV, WD 8 mm). The specimen chamber of the microscope can accommodate samples up to 200 mm in diameter.

The microscope incorporates a through-the-lens detection system that features a new energy filter designed to vary the mixture rate of secondary electron and backscattered electron images.

It features a new graphical user interface designed to collectively define, save and retrieve photographing and imaging conditions to facilitate data acquisition under optimum conditions. Simultaneous acquisition of four different types of images is also supported by this feature.

For more information, visit: www.jeolusa.com

JEOL USA
11 Dearborn Road
Peabody, MA 01966
Phone: (978) 535-5900
Fax: (978) 536-2205